Polyimide Electrostatic Chuck - List of Manufacturers, Suppliers, Companies and Products

[Demo unit available for loan] Polyimide electrostatic chuck

Contributes to maintaining cleanliness! Used in semiconductor manufacturing equipment and display manufacturing equipment, etc.

The "Polyimide Electrostatic Chuck" generates fewer particles due to wear and contributes to maintaining cleanliness since it has no moving parts. It can grip thin or easily deformable products without applying stress, and when used for transporting wafers or glass, it can operate with less than 1W of power. Additionally, the gripping force is effective not only in the atmosphere but also in a vacuum. It is also adopted in equipment that combines atmospheric and vacuum processes. 【Features】 ■ Clean device ■ Low damage ■ Usable under vacuum ■ Low power consumption *For more details, please refer to the PDF document or feel free to contact us.